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Cluster Report Photonics in the Capital Region Berlin-Brandenburg

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84 Cluster Report Optics and Photonics – Microelectronics and Microsystems Technology Prof. Dr. Johanna Wanka, Federal Minister of Education and Research, at the opening of the FMD © BMBF, Hans-Joachim Rickel Gallium oxide sample on chip holder for electrical characterisation © PDI Fraunhofer IZM and Fraunhofer HHI, and Brandenburg, to the IHP. This makes the region the most important location for FMD alongside Dresden. The research factory concept jointly developed by the Fraunhofer Institutes and the Leibniz Association envisages combining technological capabilities in a joint technology pool, coordinating to close equipment gaps, and adapting important laboratory lines for microelectronic technologies to changing technologies. In order to advance research topics in a targeted manner, FMD is organised into four technology parks: silicon-based technologies, compound semiconductors, heterointegration, and design, test and reliability. Integrating materials science, physics, chemistry, electrical engineering, computer science, and precision engineering – microsystems technology is a research field in which many disciplines come together. At TU Berlin, there are several chairs related to microsystems technology in the Institute for High Frequency and Semiconductor System Technologies (Faculty IV). In March 2018, for example, a professorship in silicon photonics was newly created with Dr. Lars Zimmermann as its chair. He also heads the Silicon Photonics Group at IHP in Frankfurt (Oder). He is also the scientific coordinator of the Joint Lab Silicon Photonics, which is jointly operated by TU and IHP. With its support for the Leibniz Science Campus Growth and Fundamentals of Oxides (GraFOx), the Leibniz Association is setting a clear course for fundamental research into semiconducting oxides, which are particularly suitable for the development of novel (opto-)electronic components and energy applications with outstanding performance capabilities – such as transistors for switching high voltages in power electronics, UV detectors, or memory devices. GraFOx is coordinated by the Paul-Drude-Institut für Festkörperelektronik (PDI), a Leibniz Institute within the Forschungsverbund Berlin e. V. (Berlin Research Association). Other partners include the Leibniz Institute for Crystal Growth (IKZ), also part of the research network, the Fritz- Haber-Institute (FHI) of the Max Planck Society for the Advancement of Science, Humboldt University Berlin, and Technical University Berlin. parameter/en/ Research and industry In September 2017, Dresden and Cottbus were pleased when the Dresden-based Fraunhofer Institute for Photonic Microsystems IPMS received a positive evaluation for its Fraunhofer Project Group “Mesoscopic Actuators and Systems (MESYS)”. The Fraunhofer project group, which is active in Dresden and Cottbus at the Brandenburg University of Technology Cottbus-Senftenberg (BTU), is led by Prof. Harald Schenk. He is also director of Fraunhofer IPMS and endowed chair of micro- and nanosystems at BTU. The group is developing a new class of electrostatic bending transducers. These include, for example, novel electrostatic microactuators, so-called nanoscopic electrostatic drives (NEDs), which will be used in microacoustics and microfluidics. Since January 1, 2018, the project group has become a part of the newly founded Fraunhofer IPMS “Integrated Silicon Systems” (ISS) division.

Cluster Report Optics and Photonics – Microelectronics and Microsystems Technology 85 The iCampus Cottbus is a scientific project funded by the German Federal Ministry of Education and Sciences. This project with a volume of 7.5 Million € aims to help develop a hub on microsensorics and electronics in Cottbus that inspires local SMEs on finding sensor solutions for their businesses. Started in 2019 at the Brandenburg University of Technology Cottbus-Senftenberg in cooperation with the Leibniz-Association (Leibniz-FBH and IHP) and Fraunhofer-Foundation (Fraunhofer IPMS and IZM) the iCampus is now working in six sensor groups. The four institutes have been leaders in microsystem technology for years and are working at their branch offices in Cottbus on sensor systems for applications in the fields Industry4.0, Smart Health and Smart Farming. IHP – Innovations for High Performance Microelectronics © IHP/Patrick Pleul The IHP – Innovations for High Performance Microelectronics in Frankfurt (Oder) is an institute of the Leibniz Association. The 320 workers at IHP are researching and developing silicon-based systems, high-frequency circuits and technologies, and new materials. They are developing solutions for such applications as wireless and broadband communication, for aerospace, biotechnology, and medicine, for the automotive industry, as well as security technology and industrial automation. IHP has a 1,000 m² (10,700 sq. ft.) class 1 clean room where a pilot line for technological developments and the preparation of high-speed circuits with 0.13/0.25 µm SiGe- BiC-MOS technologies are operated. This service is also offered to industrial customers. One of the joint labs is located at the Technical University of Applied Sciences Wildau (TH Wildau) in the Photonics, Laser and Plasma Technologies Working Group. IHP employees are involved in teaching and students can complete internships and research for bachelor’s and master’s theses at IHP. Indeed, five graduates from Wildau are now on staff at IHP. But the research also benefits: IHP and TH Wildau are collaborating on the HOPBIT project, which is developing a technology platform for the integration of photonic silicon organic hybrid (SOH) devices into a silicon-based chip technology. The research project is supported by the European Regional Development Fund (ERDF). optical-technologiesphotonics IHP operates eight joint labs with universities in the region (BTU Cottbus-Senftenberg, University of Potsdam, HU Berlin, TU Berlin, and TH Wildau) as well as with universities in Poland and Turkey. They are intended to bridge the gap between research at IHP and the partners’ teaching and research. Topics range from reliable sensor networks (BTU Cottbus-Senftenberg) to wireless broadband communication systems (HU Berlin) and silicon photonics (TU Berlin). Other relevant projects at TH Wildau are located in the Mechanical Engineering Department, for example the Materials Engineering Group is working on technology for microelectronic wire bonding together with the company Delvotec. With the expertise of the scientists and the help of various microscopic analysis methods, such contacts can be optimised, failure mechanisms can be clarified, and the reliability of electronic assemblies can be improved.

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