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Cluster Report Photonics in the Capital Region Berlin-Brandenburg

  • Text
  • Imaging
  • Photonics
  • Berlin
  • Optical
  • Laser
  • Technologies
  • Optics
  • Microsystems
  • Components
  • Brandenburg

5.2 Microsystems

5.2 Microsystems Technology Tiny systems with diverse skills Harald Pötter, Doreen Friedrich, Klaus-Dieter Lang, Herbert Reichl, Maik Hampicke, Gerrit Rössler, Kai Kolwitz Mobile phones contain cameras and GPS sensors. Cars automatically read road signs and pull themselves back on track when they swerve. Pacemakers provide diagnostic capabilities and transmit information on the health of the wearer to the treating physicians. Such complex, miniaturized electronic and optical systems have become an indispensable part of everyday life. And they are conquering more and more applications. This requires technology that is packed with features and brings individual components into action within a confined space, whether in the form of conventional circuits or integrated monolithically into semiconductor materials and substrates. Whenever new operating principles are developed, it takes someone to bring them into as tiny as possible and integrated form. In terms of microsystems technology, Berlin-Brandenburg is one of the strongest regions in Germany. Key topics in the region are wide-bandgap semiconductors (see section 5.2.1), power electronics (section 5.2.2), sensors (section 5.2.3) and system integration technology (section 5.2.4). Microsystems combine the scientific disciplines The great strength of the Berlin-Brandenburg region is networking. And in microsystems technology it is particularly valuable: In Berlin-Adlershof, the leading Berlin research institutions work together in ZEMI – Centre for Microsystems Technology – and offer their know-how and infrastructure for industrial projects. ZE- MI members include the Federal Institute for Materials Research (BAM), the Helmholtz-Center for Materials and Energy, the Ferdinand-Braun-Institute, Leibniz-Institute for Highest Frequency Technology (FBH), the Fraunhofer-Institute for Reliability and Micro Integration (IZM), the Fraunhofer-Institute for Production Systems and Design Technology (IPK), as well as the Technical University of Berlin with its Departments of Machine Tools and Factory Management, Precision Engineering and Microtechnology. When it comes to miniaturization and integration of electronics, the Fraunhofer IZM is very much in demand. There again, it supports companies and scientific institutions in development of robust and reliable electronics, and in bonding them and integrating them into the application environment. Emphases at the Fraunhofer IZM are integration on the substrate and wafer levels as well as design and reliability of electronic microsystems. For example, they work on micro-cameras which measure less than 1*1*1 mm but have 64,000 pixels. Only consistent production at wafer level allows such low-cost manufacturing that single use as a disposable endoscope is possible. Fraunhofer IZM substrate line for production-related research © Fraunhofer IZM Recently, the IZM – as part of the research ratings in Electrical and IT Engineering – emerged as the best of all 47 German research institutions active in these fields. In terms of research performance, effectiveness, efficiency, promotion of young talent, and transfer ability, the Science Council attested very good to excellent performance by the IZM. Materials and basic research The Fraunhofer IZM emerged from the research focus “Micro-peripheric Technologies” at the TU Berlin. Today, they both jointly operate the Berlin Center of Advanced Packaging, which actively covers the whole spectrum of miniaturization and system integration. Microsystems technology also occupies the TU Berlin in additional areas. For example, at the Institute for Solid State Physics, the Department of Optical and Optoelectronic Integration was installed, where basic research is planned. There is also the research of semiconductor nano-photonics, in which the FBH is also involved – with the aim to develop novel photonic and nano-photonic components. The Institute of Optics and Atomic Physics conducts research on thin-film systems for the production of filters and temperature sensors. And of course there are TU areas involved in microsystems technology such as microelectronics and institutes such as those for Engineering Design, Micro- and Medical Technology, or for High Frequency and Semiconductor System Technologies. The same applies to the TU Departments of Machine Tools and Factory Management, Precision Engineering and Microtechnology, together with the neighboring Fraunhofer-Institute for Production Systems and Design Technology (IPK). 80

5.2 Microsystems Technology The Fraunhofer-Institute for Applied Polymer Research (IAP) in Potsdam-Golm is also working on fundamentals of microsystems technology: It develops new organic materials for use in polymer electronics, especially those that are light sensitive and be controlled and managed by photochemical, holographic or other light-based methods. The Institute of Thin Film Technology and Microsensors (IDM) is also researching such materials. The scope of work includes the chemical synthesis of optical and sensory functional materials, the development of structuring and processing as well as replication technologies, and the development of optical and sensory functional elements. The IDM develops polymer and composite materials particularly for photochemical, holographic and electron-beam patterning. The Brandenburg Technical University Cottbus and the Leibniz-Institute for Innovative Microelectronics in Frankfurt (Oder) (IHP) operate a Joint Lab on the university campus which conducts research mainly on and with silicon. Aside from applications in photovoltaic research, they research silicon light emitters for optical data transfer on-thechip and future terahertz field-effect transistors. The Leibniz-Institute itself is working on the development of wireless communication technology as well as on materials for the micro- and nanoelectronics. Diode laser system for FreshScan - thanks to microsystems technology only 2x1 cm in size © FBH/schurian.com nic and opto-electronic integrated systems. It is working with chip-level technologies of the latest generation, such as chip on board or flip-chip and in a fully automated process achieves positioning accuracies in the sub-micron range. Micro-technologies in a clean room © HTW Berlin/Sonja Trabandt The HTW Berlin even offers a degree in microsystems technology. It takes seven semester to the bachelor's degree and provides – aside a thorough education in the engineering core competencies – access to advanced simulation and CAD techniques, to computer science, electronics, sensors and microsystems technology. Micro-optics and micro-optical systems Especially at the interface of microsystems technology and optical technologies, the Berlin-Brandenburg region offers a lot. Among the projects with the greatest appeal is FreshScan, a laser system for checking the freshness status of meat. Participants include, among others, the Fraunhofer IZM, the FBH and the TU Berlin Institute of Optics and Atomic Physics. The Fraunhofer IZM has helped to integrate the technology into a compact hand-held scanner. The scanner communicates with the PC via Bluetooth and is operated via a touchscreen. Also in the industry, many companies are engaged in microoptics. For example, AEMtec in Berlin-Adlershof with over 100 employees has expertise in the development, qualification, industrialization and production of miniaturized and complex electro VCSEL-Array © AEMtec GmbH Finetech is a supplier of equipment for a variety of rework and micro assembly applications. The main topics include laser bar bonding, VCSELs and photodiodes, optical packages that consist mainly of optical (lenses, prisms, apertures, filters, etc.) and electronic components, as well as chip-on-glass (COG), a flip-chip technology for the direct assembly of circuits on glass substrates. COG is mainly used for source driver chips used in TFT technology, namely for LCD and plasma screens, with e-ink and OLED displays or 3D concepts. The company Dr. Michael Himmelhaus – NanoBioAnalytics specializes on the development and manufacture of micro- and nanooptical systems for optical sensing and bioanalytics. The main focus is on micro-particle sensors based on so-called whispering- 81

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